发明名称 INTERFEROMETER
摘要 PURPOSE:To perform stable measurement even under the environment such that the vibration is applied to a measuring meter, by dividing luminous flux to be measured into a pair of two luminous fluxes and respectively propagating both luminous fluxes through independent solid closed passages. CONSTITUTION:The luminous flux 2 to be measured emitted from a beam source 1 becomes parallel luminous flux 4 to be incident to an optical fiber bundle 5. The optical fiber bundle 5 is composed of (N) pairs of fiber pairs 6 each consisting of two fibers. One fiber 7 of each fiber pair has an equal beam path length (l) with respect to (N) pairs of fiber pairs 6 and the other fibers 8 are different at every pairs and the beam path length of one fiber of the n-th pair becomes l+(n-N/2)XDELTAl. By this constitution, there is beam path length difference of (n-N/2)XDELTAl between two fibers of the n-th pair and beam path difference is different by DELTAl between the n-th pair and the (n+1)-th pair. The beam from two fibers 7, 8 of each pair is again coupled by a beam coupler 9 to generate interference and detected by the corresponding pixel 11 of a unidimensional multichannel beam detector 10 composed of N-bit pixels. By this method, stable measurement can be performed even under the environ ment such that vibration is applied.
申请公布号 JPH01119735(A) 申请公布日期 1989.05.11
申请号 JP19870277444 申请日期 1987.11.04
申请人 HITACHI LTD 发明人 MATSUI SHIGERU
分类号 G01J3/45;G01B9/02;G01J9/02;G01M11/00;G01M11/02;G02B6/00;G02B6/12;G02B6/122 主分类号 G01J3/45
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