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发明名称
VAPOR GROWTH METHOD FOR SEMICONDUCTOR THIN FILM CRYSTAL
摘要
申请公布号
JPH01117315(A)
申请公布日期
1989.05.10
申请号
JP19870273445
申请日期
1987.10.30
申请人
HITACHI CABLE LTD
发明人
SAKAGUCHI HARUNORI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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