发明名称 PROCESS AND APPARATUS FOR CONTINUOUS PRODUCTION OF LIGHTWEIGHT ARRAYS OF PHOTOVOLTAIC CELLS
摘要 <p>A process and apparatus for contiuously producing a relatively large-area, lightweight array of thin film semiconductor alloy photovoltaic cells having no substrate includes depositing a semiconductor alloy film, such as amorphous silicon, on a traveling surrogate substrate, applying a support material to the traveling film to give it mechanical strength and separating the film and support material from the traveling surrogate substrate. The surrogate substrate is preferably an endless stainless steel band from which the deposited alloy film is repeatedly stripped and on which deposits are repeatedly made. The apparatus may provide for the deposition and patterning of a back electrode on the substrate before deposition of the alloy film to form one set of electrical interconnections for the array. The apparatus may also provide for the deposition and patterning of a transparent, electrically conducting layer on the alloy film, before application of the support material, in order to form a second set of electrical interconnections for the array. The apparatus may also apply a protective, support material to the rear of the alloy film.</p>
申请公布号 EP0218193(A3) 申请公布日期 1989.05.10
申请号 EP19860113552 申请日期 1986.10.02
申请人 ENERGY CONVERSION DEVICES, INC. 发明人 HANAK, JOSEPH J.
分类号 H01L31/04;H01L31/0392;H01L31/18;H01L31/20;(IPC1-7):H01L27/14 主分类号 H01L31/04
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