发明名称 BONDING DEVICE
摘要 PURPOSE:To manufacture elements with high assembling precision while improving the assembling yield by a method wherein any excessive solder is sucked up to be removed using a vacuum solder sucking tube. CONSTITUTION:Any excessively bonded solder 7 is sucked up thinly and evenly by a vacuum solder sucking tube 9. Then, the solder sucked up by the vacuum solder sucking tube 9 adheres to a net 10 fixed to the inner wall of the tube 9. The net 10 is made removable to prevent the tube 8 from being stuffed with the adhered solder. Next, a chip fixed to a chip sucking tube 5 is bonded onto the thinly and evenly spread solder 7. At this time, a vacuum pump 11 installed in a bonding device main body 13 may be connected to the vacuum solder sucking tube 9 from a vacuum pipe. Furthermore, the solder 7 is spread on a submount 4 using a pair of tweezers in the bonding process, however, an automatic solder spreader may be installed in the bonding device main body 13.
申请公布号 JPH01117333(A) 申请公布日期 1989.05.10
申请号 JP19870276090 申请日期 1987.10.30
申请人 MITSUBISHI ELECTRIC CORP 发明人 NANBA HARUMI;TAKAHASHI SHOGO
分类号 H01L21/52 主分类号 H01L21/52
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