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发明名称
ANALYZER OF HIGH FREQUENCY INDUCTION COUPLED PLASMA
摘要
申请公布号
JPH01117262(A)
申请公布日期
1989.05.10
申请号
JP19870274230
申请日期
1987.10.29
申请人
YOKOGAWA ELECTRIC CORP
发明人
MATSUZAKI HISAFUMI
分类号
H01J49/12;G01N27/62;H01J37/22;H01J49/06
主分类号
H01J49/12
代理机构
代理人
主权项
地址
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