摘要 |
<p>A vertical MOSFET device including a semiconductor layer having a first conductivity type, in which a base region having a second conductivity type is formed in the semiconductor layer, and a source region having the first conductivity type is formed in the base region, in which gate electrode is formed at least on the above described base region via an insulating gate film to form a channel between the semiconductor layer and the source region, and a protector having PN or Schottky junction, which is formed between the source region and the gate electrode and is thermally contacted with at least one of the other members.</p> |