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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01117062(A)
申请公布日期
1989.05.09
申请号
JP19870275148
申请日期
1987.10.29
申请人
NEC CORP
发明人
WAKABAYASHI HIROYUKI
分类号
H01L21/74;H01L21/331;H01L21/8228;H01L27/08;H01L27/082;H01L29/72;H01L29/73;H01L29/732
主分类号
H01L21/74
代理机构
代理人
主权项
地址
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