| 摘要 |
PURPOSE:To weaken restriction on lead wire portion and prevent generation of crack surely by giving annealing heat treatment to lead wire portions connected to a heater coil and at the same time buried into ceramic material and thereafter sintering them together. CONSTITUTION:A vortex chamber 5 of a heat generating vortex chamber 1 is formed of ceramic material, in which is buried a heater coil 14. Lead wire portions 14b, 14c connected to the heater coil 14a and at the same time buried in the ceramic material are given annealing heat treatment. Next, the ceramic material is sintered in buried condition of the heater coil 14a and the lead wire portions 14b, 14c given annealing heat treatment into the ceramic material. Thus, it can be done to weaken restriction on the lead wire portions and to prevent generation of crack surely. |
