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发明名称
FREMGANGSMAADE TIL PLASMA-RENSNING AF OVERFLADER
摘要
申请公布号
DK226989(D0)
申请公布日期
1989.05.09
申请号
DK19890002269
申请日期
1989.05.09
申请人
PRESTATIONS DE SERVICES, S.P.S., SOCIETE DE
发明人
DESSAUX, ODILE;MUTEL, BRIGITTE;SZURMINSKI, DANIEL
分类号
B08B5/02;B08B7/00;C23G5/00;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):B08B7/00;C23F4/00;G21F9/28;H05H1/24
主分类号
B08B5/02
代理机构
代理人
主权项
地址
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