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发明名称
THIN FILM FORMING EQUIPMENT
摘要
申请公布号
JPH01117019(A)
申请公布日期
1989.05.09
申请号
JP19870274442
申请日期
1987.10.29
申请人
RICOH CO LTD
发明人
OTA WASABURO
分类号
G11B5/85;H01L21/205
主分类号
G11B5/85
代理机构
代理人
主权项
地址
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