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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01117023(A)
申请公布日期
1989.05.09
申请号
JP19870274456
申请日期
1987.10.29
申请人
SHARP CORP
发明人
MIURA ATSUSHI;OMA TAKAHIKO
分类号
H01L21/265;H01L21/266;H01L21/336;H01L29/78
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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