MEASURING METHOD FOR OBJECT BY SHAPE-SWITCHING FOR CHANGEABLE MIRROR AND NON-SCANNING CONFOCAL MICROSCOPE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a measuring method for an object by switching for shifting a changeable mirror, largely reducing a measuring time with an easy structure, and a non-scanning confocal microscope using the same. SOLUTION: The confocal microscope by a monochromatic light source measures the height shape of the object without scanning in an axial direction. Three to five kinds of different defocuses are generated by switching the shape of a changeable mirror 7 in the confocal microscope (system) to change it, and then the height of the object is determined by confocal output intensity in respective condition. Genetic Algorithm is used for the optimization of the shape of the changeable mirror 7, and the information entropy of the spatial spectrum of a confocal spot shape in a longitudinal direction (a direction parallel to an x-y surface) is used as the index at the optimization. The position in the axial direction of the object (a direction indicated by an arrow 21) can be measured with an error 0.64% in the range of 50μm by using a system actually prepared. COPYRIGHT: (C)2005,JPO&NCIPI