| 摘要 |
PURPOSE:To suppress the release of photoelectrons of a radiation absorbing layer significantly by applying a diamond-like carbon film of 50-2,000Angstrom on a Bi layer of an X rays incident surface of a calorie meter type radiation detector. CONSTITUTION:An ion implantation of P with a dosage of 10<15>cm<-2> is performed with respect to an Si single crystal 200mum thick using an ion implantation device under conditions of an acceleration current of 100kV to form a thermistor layer 3 comprising 0.1mum n-type layer. On the other hand, an X rays absorbing layer 1 is made of Bi at a thickness of 2mum by an evaporation method or the like. A planar matter thus obtained is set on the RF feeder side and a high frequency electric field of 13.56MHz is applied running a mixture of CH4 and hydrogen as material gas under conditions of an RF output: 50W, a pressure: 0.04Torr and a temperature: room temperature to form a diamond-like carbon film 5 with a thickness of 200Angstrom . The use of an element thus obtained as calorie meter type radiation detector enables improvement in absorption efficiency of X rays photon with an aid of the diamond-like carbon film.
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