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发明名称
摘要
申请公布号
JPH0123802(B2)
申请公布日期
1989.05.09
申请号
JP19800051399
申请日期
1980.04.18
申请人
FUJITSU LTD
发明人
TSUCHA CHIKARA
分类号
H01L27/04;G05F3/26;G05F3/30;H01L21/822
主分类号
H01L27/04
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