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发明名称
SEMICONDUCTOR CHECKER
摘要
申请公布号
JPH01117040(A)
申请公布日期
1989.05.09
申请号
JP19870274511
申请日期
1987.10.29
申请人
FUJIKOSHI KIKAI KOGYO KK;NAGANO KEIKI SEISAKUSHO:KK
发明人
FURUKAWA MASANORI;GOTO KOZO
分类号
G01R31/26;G01N27/00;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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