发明名称 STRUCTURE FOR HOLDING PLANE REFLECTION MIRROR
摘要 PURPOSE:To stably hold a plane reflection mirror so as to be adjusted without causing the distortion of said mirror by holding a supporting plate between an adjusting screen and a pressing pin and pressing the supporting plate with the spring force for pushing in a gravity direction by means of the pressing pin. CONSTITUTION:The titled structure is constituted of the supporting plate 11 for supporting the plane reflection mirror 6 and a base plate 12 for supporting the supporting plate 11 and provides the adjusting screw 26 and the pressing pin 31 facing to each other in a line or nearly in a line on the base plate 12. The pressing pin 31 and the adjusting screw 26 hold the supporting plate between them. The pressing pin 31 presses the supporting plate with the force of screw 32 for pushing in the gravity direction. Since the distortion is not caused in the adjustment by the adjusting screw 26 and moreover the direction of the pressing force of the pressing pin 31 works in a direction where it does not resist to the gravity, the position and the angle of the plan reflection mirror do not alter ever if the force of the spring 32 is deteriorated, so that it can be stably supported.
申请公布号 JPH01116612(A) 申请公布日期 1989.05.09
申请号 JP19870273257 申请日期 1987.10.30
申请人 USHIO INC 发明人 INOMATA YOSHIHARU
分类号 G02B7/198;G02B7/18;H01L21/027;H01L21/30 主分类号 G02B7/198
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