| 摘要 |
<p>PURPOSE:To prevent the deflection or a tear from being generated in an organic film by providing a ventilation hole smaller than the particle diameter of dust for obstructing its adhesion to a photomask, on the organic thin film extended over a pellicle cover frame. CONSTITUTION:On a light transmissive organic thin film 2 provided on the pellicle cover frame 1, minute holes 8 which are ventilation holes are formed. This organic thin film 2 is provided in order to obstruct dust, the size of the hole 8 is selected so as to become smaller than the particle diameter of dust to be obstracted, and also, as for the organic thin film 2, it is desirable that its optical characteristic is uniform extending over the whole area. Also, this pellicle cover frame can set an atmospheric pressure difference between a void space formed by attaching the frame to a photomask and the outside to zero. In such a way, the deflection or the breakage, etc., is prevented from being generated in the organic thin film 2 due to temperature variation, on atmospheric pressure variation or handling by a vacuum chuck holder 7.</p> |
