| 摘要 |
PURPOSE:To improve the accuracy in the measurement of humidity by constituting a positive electrode which is formed porous in a detection part into a flash type to embed the electrode in a solid electrolyte part without bringing the same into direct contact with the atmospheric air or measuring gas and dissipating the released oxygen. CONSTITUTION:A humidity sensor 200 is formed by printing the positive elec trode 1, a negative electrode 2, a heater 5, and lead parts 6, 7, etc., on a green sheet consisting of a solid electrolyte such as, for example, zirconia, then pressu rizing, joining and burning the same. A space part 3 is communicated with the external air through a small hole which limits the quantity of the oxygen to be diffused. The electrode 1 is embedded between zirconia layers 10, by which the direct contact of the electrode with the atmospheric air or the measur ing gas is obviated; in addition, the electrode is formed porous and, therefore, the generated gaseous oxygen is sufficiently dissipated. The factor for a measure ment error is thus decreased and the accuracy of humidity measurement is improved. |
