| 摘要 |
<p>PURPOSE:To prevent a reduction in a detecting sensitivity by a method wherein a plurality of branch conducting layers formed in such a way that they are extended from a main conducting layer formed on a semiconductor substrate so as to connect a pair of position signal electrodes to the effective incident region only of the incident surface of the substrate are provided. CONSTITUTION:A pair of position signal electrodes 2a and 2b are provided on both end parts on the side of the shorter side of the incident surface of a semiconductor substrate 1 and a main conducting layer 3 is formed on the central part of the incident surface between these electrodes. Moreover, branch conducting layers 4 are formed on an effective incident region B only in such a way that they are extended from the layer 3 in the direction of the incident surface and these are formed into a plurality of layers at equal intervals to one another. Accordingly, as no branch conducting layer does not exist on a reactive incident region C, a probability that electron-hole pairs flow in the layer 3 is low even though the electron-hole pairs are generated here. Moreover, a P-N junction capacitance is also reduced by the amount of the branch conducting layers which are not provided. Thereby, a reduction in a detecting sensitivity can be prevented.</p> |
