发明名称 Method of synthesising carbon nano tubes
摘要 Process for synthesizing carbon nanotubes comprises catalytically depositing carbon in the gas phase on a catalytic layer formed on a support element. An ion beam is used to modify the physical, chemical and/or conducting properties of the nanotubes before, during and/or after formation of the nanotubes. Preferred Features: The catalytic layer is 10-500, preferably 30-60 nm thick. The ion beam is guided using a deviating element and/or a focussing element and is controlled using a stencil mask. The ion beam contains particles made from Co, Ni, Fe, He, H, Ar, Xe, Kr, O, or a dopant made from As, P, B, Ag, Au, Pt, Pd and their mixtures. The catalytic layer is a metal layer.
申请公布号 GB2384008(B) 申请公布日期 2005.07.20
申请号 GB20020026900 申请日期 2002.11.18
申请人 * ELECTROVAC, FABRIKATION ELEKTROTECHNISCHER SPEZIALARTIKEL GESELLSCHAFT M.B.H.;* IMS-IONEN MIKROFABRIKATIONS SYSTEME GESELLSCHAFT M.B.H 发明人 XINHE * TANG;KLAUS * MAUTHNER;ERNST * HAMMEL;HANS * LOSCHNER;ELMAR * PLATZGUMMER;GERHARD * STENGL
分类号 B01J37/02;B01J37/16;C01B31/02;C23C16/04;C23C16/18;C23C16/26;C23C16/48;C23C16/513;C30B23/00;C30B33/00 主分类号 B01J37/02
代理机构 代理人
主权项
地址