| 摘要 |
PURPOSE:To thin and lighten a device, to decrease the attenuation of X-rays and to realize a long service life of the device by covering a photoelectric converting part and an X-ray visible light converting part provided on a substrate, with a light transmissive and moisture- proof adhesive layer, and also, covering the upper face with an Al foil inserted fluororesin. CONSTITUTION:On the upper surface of a substrate 1 whose X-ray absorbing power is weak, and also, which consists of a carbon fiber/epoxy composite material being light in weight and tough, an Al thin film 2 for reflecting a visible light and shielding an electric noise is provided. In the center of the thin film 2, a foundation electrode 4 which has used a polyimide film 3 whose X-ray absorbing power is weak, as a base material, and has brought Al/Cr to vacuum vapor-deposition on the upper surface is formed, and a photoelectric converting element 5 consisting of amorphous silicon, and a transparent electrode film 6 are formed on the upper surface of the electrode 4, and on its upper surface, respectively, by which a photoelectric converting part 20 is constituted. The converting part 20 is covered with a light transmissive and moisture-proof adhesive layer 7a, and also, on its surface, an X-ray visible light converting part 8 is laminated. On the upper surface of the converting part 8, a light transmissive and moisture-proof adhesive film 7b is laminated, and also, a Tedra film 9 (Al foil inserted fluororesin) is stuck. In such a way, deterioration of the function caused by moisture absorption of the converting part is prevented, and the service life can be extended.
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