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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH01115143(A)
申请公布日期
1989.05.08
申请号
JP19870271937
申请日期
1987.10.29
申请人
FUJITSU LTD
发明人
ARIMOTO YOSHIHIRO
分类号
H01L21/31;H01L21/02;H01L27/12
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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