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发明名称
PROJECTION OPTICAL SYSTEM FOR USE IN PRECISE COPY
摘要
申请公布号
EP0237041(A3)
申请公布日期
1989.05.03
申请号
EP19870103472
申请日期
1987.03.11
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
SATO, TAKEO;ARAKI, NOBUHIRO;KAWATA, KOICHI;NOMURA, NOBORU;UENO, ATUSHI;YOSHIDA, SHOTARO
分类号
G02B17/08;G03F7/20;(IPC1-7):G02B17/08
主分类号
G02B17/08
代理机构
代理人
主权项
地址
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