发明名称 |
An apparatus for automatically controlling the magnification factor for a scanning electron microscope. |
摘要 |
<p>The present invention relates to an apparatus for calibrating the magnification of a scanning electron microscope. The microscope includes a generator for generating an electron beam, a scanning signal generator for producing a scanning signal and a unit for scanning the beam. The apparatus is comprised of a calibration object which has a plurality of aligned elements thereon which, when scanned by the electron beam produces a signal having a frequency which has a fundamental periodicity dependent on the spacing of the aligned elements. A detector is provided for detecting the signal and producing an output signal having a data content and the fundamental periodicity. A unit is connected to the detector for determining the fundamental periodicity of the output signal from the entire data content of the output signal. A control unit is provided for producing a desired magnification signal. A generator is connected to the unit for determining the fundamental periodicity of the output signal and to the control unit for producing a correction signal which is derived from the desired magnification signal and the fundamental periodicity of the output signal. A combiner is connected to the generator and the unit for scanning the beam for combining the correction signal and the scanning signal to produce a modified scanning signal which scans the electron beam to produce the desired magnification of the scanning electron microscope.</p> |
申请公布号 |
EP0314520(A2) |
申请公布日期 |
1989.05.03 |
申请号 |
EP19880310211 |
申请日期 |
1988.10.31 |
申请人 |
VICKERS INSTRUMENTS (CANADA) INC |
发明人 |
HERRIOT, GLEN A. |
分类号 |
H01J37/147;H01J37/22;H01J37/28 |
主分类号 |
H01J37/147 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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