发明名称 VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON EINKRISTALLINEN HALBLEITERPLATTEN
摘要 In a process for manufacturing monocrystalline semiconductor plates, e.g. wafers, the melt (12) to be crystallized is introduced into a moulding shaft (14) connected to the bottom of the melting crucible (10). The moulding shaft has a smooth-walled inner surface machined to a high-quality optical finish and an inner width equal to the thickness of the semiconductor plates to be manufactured. As the monocrystal grows in the moulding shaft (14), it is pushed downward. When it reaches a sufficient length, the monocrystal can be severed perpendicular to the direction of feed at a distance from the length of an outer edge of the semiconductor plates to be manufactured.
申请公布号 DE3735434(A1) 申请公布日期 1989.05.03
申请号 DE19873735434 申请日期 1987.10.20
申请人 WISOTZKI,JUERGEN 发明人 WISOTZKI,JUERGEN
分类号 C30B15/08;C30B15/34 主分类号 C30B15/08
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