发明名称 |
Sin-containing coatings for electronic devices |
摘要 |
A method of forming at low temperatures silicon- and nitrogen-containing ceramic or ceramic-like coatings for the protection of electronic devices. The coatings are produced by the ceramification at temperatures of, or below, 400 degrees Centigrade of preceramic silicon nitrogen-containing polymer coatings deposited from a solvent solution. The coatings are useful for planarizing the surfaces of electronic devices and for passivation.
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申请公布号 |
US4826733(A) |
申请公布日期 |
1989.05.02 |
申请号 |
US19860937276 |
申请日期 |
1986.12.03 |
申请人 |
DOW CORNING CORPORATION |
发明人 |
HALUSKA, LOREN A.;MICHAEL, KEITH W.;SNOW, SARAH S.;TARHAY, LEO;BANEY, RONALD H. |
分类号 |
H01L21/318;(IPC1-7):B32B9/04 |
主分类号 |
H01L21/318 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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