PHOTO RESIST APPLYING DEVICE,申请号JP19870272271-传众专利搜索

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发明名称	PHOTO RESIST APPLYING DEVICE
摘要
申请公布号	JPH01113755(A)	申请公布日期	1989.05.02
申请号	JP19870272271	申请日期	1987.10.27
申请人	NEC CORP	发明人	YAMADA YOSHIAKI
分类号	B05C11/08;G03C1/74;G03F7/16;H01L21/027;H01L21/30	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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