MANUFACTURE METHOD FOR RECORD ELEMENT OF SENSING HEAT

摘要

A method comprises (i) vapor-depositing Cr, Pd, Au onto ceramic CB (40) under vacuum and photolithograph to form metal layer (41) connected with heat-generating resistor, (ii) screen printing of matrix wiring parts with polyamide (43) as insulator with exception of the connector for dual wiring from (i), (iii) vapordepositing of thin metal layer (42) connected with input terminal (4) and photolithographing and (iv) full-printing with polyamide (44) for protection of the insulation between wirings and upper wiring.