| 摘要 |
<p>PURPOSE:To obtain heating resistor layers of high specific resistance and excellent heat resistant stability by preparing a heating resistor composed of tantalum, aluminum and oxygen. CONSTITUTION:A thermal head prepares a heating resistor containing tantalum, aluminum and aluminum oxide. Desirable specific resistance of the heating resistor of the thermal head can be obtained by preparing contents of tantalum, aluminum and oxygen. The heating resistor can be formed by a sputtering method. For example, chips of tantalum - aluminum alloy are placed on the upper face of an alumina (Al2O3) target and high frequency magnetron sputtering had better be performed in the ambient atmosphere of argon gas. The formation of the thermal head is not limited, and for example, a heating resistor layer 13, a feed conductive layer 14 composed of metal thin films and protecting layers 15, 16 composed of silicon oxide, tantalum oxide and the like are laminated on an insulating substrate 11 made of ceramic applying a glass glaze layer 12 in order.</p> |
