发明名称 PATTERNIZED ELECTROLYTIC OXIDE FILM AND ITS FORMATION
摘要 PURPOSE:To form the above stable patternized electrolytic oxide film by forming patternized aromatic monomer film and electrolyte film on an electrode substrate, further bringing a conductor into contact with the film, and electrolytically oxidizing the film. CONSTITUTION:The patternized aromatic compd. monomer film 3 is formed on the conductive part 2 of the electrode substrate 1 by sputtering, vapor deposition, etc., and the electrolyte film 4 is formed thereon. The conductor 5 is further formed on the electrolyte film 4, or a preformed conductor 5 is brought into contact with the film 4. A DC voltage is then impressed between the substrate 1 and the conductor 5 to electrolytically oxidize the aromatic compd. monomer film 3. The material is then dipped in a solvent to remove the electrolyte film 4 and the conductor 6. By this method, a patternized electrolytic oxide film having excellent homogeneity can be obtained.
申请公布号 JPH01111893(A) 申请公布日期 1989.04.28
申请号 JP19870269886 申请日期 1987.10.26
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 HAYASHIDA SHOICHI;SUKEGAWA TAKESHI
分类号 C25D1/12;H01B5/14;H01B13/00;H01L27/01;H05K1/09;H05K3/10 主分类号 C25D1/12
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