发明名称 CRUCIBLE FOR VACUUM DEPOSITION DEVICE
摘要 PURPOSE:To prevent the failure trouble of a hearth liner of the above crucible obtd. by forming the hearth liner of plural rectangular plates of a tile type. CONSTITUTION:The water-cooled crucible body 2 made of a copper alloy, etc., is formed into a hollow shape and the hearth liner 1 is formed of the plural rectangular plates 10 of the tile type. Prescribed spacings 10' are provided between the respective rectangular plates 10 which are then adhered to the above-mentioned body 2. Cooling water is passed in a cooling water passage 4. A molten metal 3 for vapor deposition is then melted to form joints 3a penetrated and solidified with the molten metal 3 between the respective rectangular plates 10. The size of the respective plates 10 and the size of the joints 3a are selected at adequate values by heat transfer analyses, thermal deformation stress analyses, etc. The thermal deformation and thermal stress of the hearth liner 1 are extremely decreased and the failure troubles of the hearth liner 1 are eliminated by this constitution. The crucible which has no problems in performance and has the high reliability of strength is thus obtd.
申请公布号 JPH01111885(A) 申请公布日期 1989.04.28
申请号 JP19870268273 申请日期 1987.10.26
申请人 MITSUBISHI HEAVY IND LTD 发明人 HIROE TETSUYUKI;MATSUMOTO TAKAHIRO;HASHIMOTO RITSUO;TANI MITSUO;NAKAISHI NOBUYOSHI
分类号 C23C22/24;C23C14/24 主分类号 C23C22/24
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