METHOD AND APPARATUS FOR EXPOSING WITH ELECTRON BEAM,申请号JP19870268157-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR EXPOSING WITH ELECTRON BEAM
摘要
申请公布号	JPH01111323(A)	申请公布日期	1989.04.28
申请号	JP19870268157	申请日期	1987.10.26
申请人	HITACHI LTD	发明人	HAYAKAWA HAJIME;MIZUNO FUMIO
分类号	G03F7/20;H01L21/027;H01L21/30	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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