| 摘要 |
NEW MATERIAL:A bisazide compound. EXAMPLE:2,6-Bis(4-azido-1-naphthylmethylene)-4-methylcyclohexanone. USE:A material for forming fine patterns for photoresists having high sensitivity within a long wavelength region. PREPARATION:4-Azido-1-naphthaldehyde and ketones (e.g., 4-methylcyclohexa none) or diamines (e.g., ethylenediamine hydrate) are subjected to condensation reaction. Furthermore, the ketones are used in an amount of preferably 0.4-0.6mol. based on 1mol. 4-azido-1-naphthaldehyde. |
