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发明名称
VAPOR GROWTH METHOD OF III-V COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH01110720(A)
申请公布日期
1989.04.27
申请号
JP19870247901
申请日期
1987.10.02
申请人
TOSHIBA CORP
发明人
TANAKA TOKUJI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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