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发明名称	GAS FLOW CONTROLLER
摘要
申请公布号	JPH01111125(A)	申请公布日期	1989.04.27
申请号	JP19880225327	申请日期	1988.09.08
申请人	SANSEI ELECTRON CO LTD	发明人	HAI EITON;DEN YOUBAN
分类号	F24C3/06;F23N1/00;F24C3/12	主分类号	F24C3/06
代理机构		代理人
主权项
地址

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