发明名称 SEMICONDUCTOR MEMORY DEVICE WIRINGS
摘要 In a memory cell matrix region of a semiconductor memory device such as a dynamic RAM or a static RAM, wirings of the same material are distributed between different layers in such a manner that the upper wirings overlap the lower wirings. Accordingly, the width of the wirings can be increased for a semiconductor memory device having a high concentration and high integration.
申请公布号 DE3569067(D1) 申请公布日期 1989.04.27
申请号 DE19853569067 申请日期 1985.11.26
申请人 FUJITSU LIMITED 发明人 EMA, TAIJI;YABU, TAKASHI
分类号 H01L27/10;H01L21/3205;H01L21/8242;H01L23/48;H01L23/52;H01L23/522;H01L23/528;H01L27/108;(IPC1-7):H01L23/52 主分类号 H01L27/10
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