| 摘要 |
<p>PURPOSE:To make it possible to save the space of a clean room regardless of the installing place even though the installing place is at the conveying part of a large-sized substrate by a method wherein at least two out of two housing parts or more are arranged in such a way that the plate-like member taking-out ports of the housing parts intersect each other orthogonally. CONSTITUTION:In a conveying mechanism 2 provided with two housing parts 3 or more for housing plate-like members S, a conveying means 4 for conveying the members S from the parts 3 to a controlling part 1 and a rotatable positioning means for positioning the members S taken out of the above parts 3, at least two housing parts 3-1 and 3-2 out of the above 2 housing parts or more are arranged in such a way that their plate-like member taking-out ports intersect each other orthogonally. For example, the housing part 3-1, on which a cassette A for a loader and housed horizontally uninspected substrates is set, and the housing part 3-2, on which a cassette B for an unloader and housed horizontally inspection finished substrates is set, are installed on the conveying part 2 of an LCD prober in such a way that their apertures, which are the substrate taking-out ports of the housing parts, make an angle of about 90 degrees to each other.</p> |
