CHARGED PARTICLE BEAM EXPOSURE APPARATUS,申请号JP19870268530-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM EXPOSURE APPARATUS
摘要
申请公布号	JPH01110729(A)	申请公布日期	1989.04.27
申请号	JP19870268530	申请日期	1987.10.23
申请人	FUJITSU LTD	发明人	HAMAGUCHI SHINICHI
分类号	G03F9/00;G03F7/20;H01L21/027;H01L21/30	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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