发明名称 ELECTRON CYCLOTRON RESONANCE NEGATIVE ION SOURCE
摘要 An electron cyclotron resonance negative ion source comprises an enclosure containing a gas or vapor of a material for forming a plasma, means for injecting into the enclosure a high frequency electromagnetic field forming electrons by ionizing the gas or vapor, means for producing within the enclosure an axially symmetric magnetic field whose amplitude increases along the axis of symmetry, whereby said amplitude, which is at a maximum in the vicinity of and upstream of the negative ion extraction zone, having in the central region of the enclosure a value for which the electron cyclotron resonance condition is satisfied, as well as means for extracting the negative ions formed, brought to a positive potential compared with the enclosure.
申请公布号 DE3662576(D1) 申请公布日期 1989.04.27
申请号 DE19863662576 申请日期 1986.04.04
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 HELLBLOM, GORAN;JACQUOT, CLAUDE
分类号 G21K1/14;H01J27/02;H01J27/18;H05H7/08;(IPC1-7):H01J27/02 主分类号 G21K1/14
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