ARRAYED WAVEGUIDE GRATING AND MANUFACTURING METHOD THEREOF

摘要

An arrayed waveguide grating and a manufacturing method thereof are provided to adjust the core thickness on a waveguide by using pressure instead of a spin-coating speed. A stamp forming process is performed to form a stamp. A bottom cladding(309) is laminated on an upper surface of a silicon substrate(308). A core polymer coating process is performed to coat a core polymer(310) on the stamp. An attaching process is performed to attach the stamp having the core polymer on the bottom cladding by using the pressure. A pattern forming process is performed to form a polymer pattern by separating the stamp from the bottom cladding. An upper cladding lamination process is performed to laminate an upper cladding(311) on the polymer pattern.