发明名称 MASTER SLICE SYSTEM SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE
摘要 PURPOSE:To reduce chip area, by arranging a plurality of a first layer wiring segments having, on end-portions, contact holes connecting a first and a second wirings, in the manner in which said contact holes on the first layer wiring segment are arranged in a line along the main wiring direction of the second layer wiring. CONSTITUTION:Contact holes 2 on a first layer wiring segment 1 connect a first layer wiring and a second layer wiring, without distinguishing whether a plurality of the first layer wirings are in a basic cell region or in a wiring region. These contact holes are regularly arranged in a line along the main wiring direction 4 of the second layer wiring. Therefore, the wiring interval rule of the second layer wiring can be set identical, for the basic cell region and the wiring region. As a result, the second layer wiring formed in the wiring region can be extended into the basic cell region in a line without being bent in the midway, so that special regions to adjust the wiring interval rule are unnecessitated. Thereby reducing chip area.
申请公布号 JPH01109744(A) 申请公布日期 1989.04.26
申请号 JP19870267067 申请日期 1987.10.22
申请人 MATSUSHITA ELECTRON CORP 发明人 NISHIURA MASAO;OTANI KAZUHIRO;FUKUI YUUKO;CHIMURA MORIYUKI;MIYAMOTO HIROYUKI
分类号 H01L21/82;H01L21/3205;H01L21/822;H01L23/52;H01L23/522;H01L23/528;H01L27/04;H01L27/118 主分类号 H01L21/82
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