发明名称 |
PLATINUM AND RHODIUM CATALYSIS OF LOW TEMPERATURE FORMATION MULTILAYER CERAMICS |
摘要 |
This invention relates to material produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices. |
申请公布号 |
EP0270229(A3) |
申请公布日期 |
1989.04.26 |
申请号 |
EP19870309356 |
申请日期 |
1987.10.22 |
申请人 |
DOW CORNING CORPORATION |
发明人 |
HALUSKA, LOREN ANDREW;MICHAEL, KEITH WINTON;TARHAY, LEO |
分类号 |
C04B41/50;C04B41/52;C23C18/12;H01L21/312;H01L21/314;H01L21/316;H01L21/56;H01L23/29;H05K3/28;(IPC1-7):C04B41/50;C04B35/14 |
主分类号 |
C04B41/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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