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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01109740(A)
申请公布日期
1989.04.26
申请号
JP19870267799
申请日期
1987.10.22
申请人
NEC CORP
发明人
HIROKAWA TOMOAKI
分类号
H01L21/302;H01L21/3065;H01L21/338;H01L21/76;H01L29/80;H01L29/812
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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