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发明名称
RESIST COATER FOR SEMICONDUCTOR WAFER
摘要
申请公布号
JPH01108724(A)
申请公布日期
1989.04.26
申请号
JP19870267167
申请日期
1987.10.21
申请人
MITSUBISHI ELECTRIC CORP
发明人
KADOTA MITSUGI
分类号
B05C11/08;E03C1/284;H01L21/027;H01L21/30
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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