VERFAHREN ZUR REGELUNG VON REAKTIVEN BESCHICHTUNGEN,申请号DD19870311304-传众专利搜索

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发明名称	VERFAHREN ZUR REGELUNG VON REAKTIVEN BESCHICHTUNGEN
摘要
申请公布号	DD267264(A1)	申请公布日期	1989.04.26
申请号	DD19870311304	申请日期	1987.12.24
申请人	VEB HOCHVAKUUM DRESDEN,DD	发明人	BECKER,WOLFGANG,DD;BEHNKE,JUERGEN,DD;KAGEL,HENNING,DD;SCHEIBNER,HELMAR,DD;SCHRADE,FRANK,DD;SCHULZE,DIETMAR,DD;WILBERG,RUEDIGER,DD
分类号	C23C14/54;(IPC1-7):C23C14/54	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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