发明名称 Direction-sensitive flow-rate indicator.
摘要 <p>Direction-sensitive flow-rate indicator for gaseous or liquid media. It comprises a semi-conductor substrate on which for each dimensional direction at least one thermocouple is arranged, in which the connecting-leads of the ends of each thermocouple extend in the direction-of-flow component of the medium and are, at least about, perpendicular to each other. It also comprises a heating-element for generating a flow-rate dependent temperature-difference in the flowing medium in the longitudinal direction of the said thermocouples, which results in a flow-rate dependent thermo-voltage between the ends of the thermocouples.</p>
申请公布号 EP0313120(A1) 申请公布日期 1989.04.26
申请号 EP19880201994 申请日期 1988.09.14
申请人 BRONKHORST HIGH-TECH B.V. 发明人 HUIJSING, JOHAN HENDRIK
分类号 G01F1/68;G01F1/684;G01F1/688;G01F1/69;G01P5/10;G01P5/12;G01P13/00;G01P13/02;H01L35/32 主分类号 G01F1/68
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