MAGNETIC HEAD

摘要

PURPOSE:To prevent the separation of a 'Sendust(R)' film at the high temperature heating process and to improve a soft magnetic characteristic by providing an intermediate layer composed of a special material on an Mn-Zn ferrite and forming the thin film of the soft magnetic material on it. CONSTITUTION:The chip with an area 10X10mm and thickness 2mm is segmented from a monocrystal Mn-Zn ferrite so that the direction vertical to the surface can become (110) and the one side surface is mirror-finished. After the mirror finished surface is sputter-etched by an RF magnetron sputter, (Fe1-aNia)1-bTib (provided that 0.4<=a<=0.7 and 0<=b<=0.2) is covered as the intermediate layer and next, the 'Sendust(R)' is covered. This is thermal- processed at 600 deg.C in a vacuum.