PARTICLE COLLECTOR FOR FLAT PANEL DISPLAY MANUFACTURING EQUIPMENT

摘要

A particle collecting apparatus for flat panel display manufacturing equipment is provided to uniformly maintain the degree of precision in equipment by employing a particle suction channel for removing particles. A main body(10) has a casing and a window. The casing has an upper surface being opened and a lower surface with a hollow structure on which a through hole for a processing tool is formed. A pressure division member(20) is air-tightly coupled to an outer circumference of the through hole. The pressure division member has a body attached on the lower surface of the casing and a plurality of discharging holes formed on the body. A gas supplying channel(40) communicates an inlet connection hole formed on the casing with the discharging holes of the pressure division member. A particle suction channel(50) communicates a discharge connecting hole formed on the casing with the through hole of the main body. The through hole of the main body is protruded downwardly.