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发明名称
ELECTRON BEAM LITHOGRAPHY DEVICE
摘要
申请公布号
JPH01107533(A)
申请公布日期
1989.04.25
申请号
JP19870263775
申请日期
1987.10.21
申请人
HITACHI LTD
发明人
OYAMA MITSUO;OKUMURA MASAHIDE;KAWANO MASAMICHI
分类号
G03F7/20;H01L21/027;H01L21/30
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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