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发明名称
OXIDATION RESISTANCE HIGH TEMPERATURE RESISTANCE CYCLIC COATING ON SILICON SUBSTRATE AND MANUFACTURE
摘要
申请公布号
JPH01108187(A)
申请公布日期
1989.04.25
申请号
JP19880244654
申请日期
1988.09.30
申请人
GTE LAB INC
发明人
BINOTSUDO KEI SARIN
分类号
C04B41/52;C04B41/89;C23C16/30;C23C16/40
主分类号
C04B41/52
代理机构
代理人
主权项
地址
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